Range X-Axis:
8" / 200mm
Resolution X-Axis:
1.97μin / .05μm
Measuring Method:
RT Linear encoder
X-axis Drive speed (max. CNC):
7.87in/s / 200mm/s
X-axis Drive speed (manual joystick):
0 - 2.0in/s / 0 - 50mm/s
Measuring Speed:
.00078 - .078 in/s / .02 - 2 mm/s
Traversing Direction:
Backward
Alpha-axis resolution:
.000225°
Alpha-axis rotating speed:
1rpm
Column resolution:
1.97μin
Column Resolution:
0.05μm
Z2-axis Measuring Method:
RT Linear encoder
Column Z2-axis drive speed (max. CNC):
7.87in/s / 200mm/s
Z2-axis drive speed (manual joystick):
0 - 2.0in/s / 0 - 50mm/s
Detector Z-Range:
320, 3200, 32000μin / 8, 80, 800μm
Detector Z-Range Resolution:
.004, .04, .4μin / .0001, .001, .01μm
Detection Method:
Differential inductance
Measuring Force:
.75mN
Y-axis measuring range:
8" / 200mm
Y-axis measuring resolution:
1.97μin / .05μm
Y-axis measuring method:
RT Linear encoder
Y-axis drive speed (max. CNC):
7.87in/s / 200mm/s
Y-axis drive speed (manual joystick):
0 - 2.4in/s / 0 - 60mm/s
Y-axis max. load capacity:
44lbs / 20kg
Y-axis table size:
7.87x7.87" / 200x200mm
Y-axis Dimensions:
12.6x25.4x4.1" / 320x646x105mm
Y-axis unit Mass:
77lbs / 35kg