Range X-Axis:
3.94" / 100mm
Resolution X-Axis:
1.97μin / 0.05μm
Measuring Method:
Linear encoder
Drive speed:
0 - 1.57 in/s / 0 - 40 mm/s
Measuring Speed:
.00078 - .2 in/s / .02 -5 mm/s
Traversing Direction:
Backward
Column Resolution:
1μm
Z2-axis Measuring Method:
Rotary encoder
Column Z2-Axis Drive Speed:
0 - .78in/s / 0 - 20mm/s
Detector Z-Range:
320, 3200, 32000μin / 8, 80, 800μm
Detector Z-Range Resolution:
.004, .04, .4μin / .0001, .001, .01μm
Detection Method:
Skidless / Skid
Measuring Force:
.75mN
Skid Radius of Curvature:
1.57" / 40mm
Detector Type:
Differential inductance
Power Supply:
AC power
Printer:
Built-in thermal
External I/O:
Digimatic ouput, RS-232C I/F
External Data Storage:
Micro SD card
Display Unit:
13x10.6x3.7"
Drive Unit:
14.6x9.6x2.8" / 372x245x71.8mm
Display Unit Mass:
8.8lbs /4kg
Drive Unit Mass:
6.6lbs / 3kg