Technical Data
XYZ Travel
Standard
300 x 300 x 200 mm
Optics
Substage LED profile, coaxial LED surface, SmartRing™ LED ring light
Illumination
Standard
Substage LED profile, coaxial LED surface, SmartRing LED ring light
Full Specifications
Standard
Optional
XYZ Travel
300 x 300 x 200 mm
XYZ Scale Resolution
1.0 μm
Drive System
DC servo with 3-axis control (X, Y, Z) and 3-axis joystick controller
Multifunction handheld controller (in lieu of joystick)
Worktable
Hardcoat anodized with fixture holes and removable stage glass; 30 kg recommended max payload
Rotary Axis
Miniature Servo Rotary (MSR™ ), MicroTheta Rotary (MTR™ )
Optics
Fixed optical magnification with VIRTUAL ZOOM, E 8.10 standard
lens
Replacement Lens: E 16.20 Wide Field-of-View/Long Working Distance,
E 4.5 High Magnification
Illumination
Substage LED profile, coaxial LED surface, SmartRing LED ring light
Conical SmartRing (included with E 4.5 lens)
Metrology Camera
6 megapixel color digital metrology camera
Field of View
7.0 mm x 5.2 mm
E 16.20: 14.0 x 10.4 mm
E 4.5: 3.5 mm x 2.6 mm
Minimum Feature Size
10 µm
E 16.20: 20 µm
E 4.5: 5 µm
Working Distance
62 mm
E 16.20: 110 mm
E 4.5: 31 mm
Sensor Options
Tactile: TP20 or TP200 Touch Probe
Software
Measure-X metrology software, QVI® Portal
Metrology Software: ZONE3 Express, Prime, or Pro in lieu of or in addition to Measure-X
Productivity Software: Measure-X Analyze, EVOLVE® Suite (Design, Manufacturing, SmartProfile®, SPC)
Offline Software: Measure-X, ZONE3
System Controller
Windows® based with up-to-date processor and onboard networking/communication ports
High-Performance Controller
Controller Options
24” flat panel LCD monitor or dual 24” flat panel LCD monitors, keyboard, 3-button mouse (or user supplied)
Accessories
Digital I/O Automation Interface
Power Requirements
100-120 VAC or 200-240 VAC, 50/60 Hz, 1 phase, 500 W
Safe Operating Environment
15-30 °C, non-condensing
Rated Environment
Temperature 18-22 °C, stable to ± 1 °C, max rate of change 1.0 °C / hour, max vertical gradient of 1 °C / meter; 30-80% humidity; vibration <0.001 g below 15 Hz
XY Area Accuracy
E2 = (2.2 + 5L/1000) µm
Z Linear Accuracy
E1 = (3.8 + 5L/1000) μm
E1 = (2.8 + 5L/1000) μm (requires optional E 4.5 lens)
Accuracy is evaluated with an OGP compensation and verification procedure where “L” is measured length in millimeters. Specifications apply within the rated environment. Standard optical specifications apply at the highest magnification of the standard configuration. XY Accuracy applies with an evenly distributed load up to 5 kg in the standard measuring plane. The standard measuring plane is defined as a plane that is within 25 mm of the worktable surface. Depending on load distribution, accuracy at maximum payload may be less than standard. Factory and on-site verification of enhanced Z accuracy specifications are quoted on request.
1. Lenses can be manually interchanged to change magnification and working distance.
2. Based on width measurement of USAF resolution test chart in best focus at the highest magnification. For reference only.
Last updated: September 2026
