
LEGEX Series Specifications
Mitutoyo LEGEX series CMMs utilize air-damped spring isolators with auto-leveling to eliminate floor vibrations.
The rigid fixed-bridge design ensures stable measurements by eliminating axis movement fluctuations.

FEM structure analysis guarantees minimal errors in geometric motion accuracy caused by load fluctuations and other variables.
Technical Specifications
Benefits
Technology:
Coordinate Measuring Machine - CNC
Units:
Inch, Metric
Resolution:
0.0000004" (0.00001mm)
Guide Method:
Air bearing on each axis
Vibration Stand:
Standard
Probe System:
PH10MQ
Touch Trigger Probe:
TP7
Scanning Probe:
MPP, SP25
Laser Probe:
SurfaceMeasure Optical
Probe:
QVP
Surface Roughness Probe:
SurfTest
Benefits
The Mitutoyo LEGEX series CMMs are equipped with an ultra-high accuracy scale unit featuring crystallized glass scales. These scales have a thermal expansion coefficient of 0.01×10-6/K, ensuring precise measurements. Additionally, the CMMs employ a high-resolution, high-performance reflection linear encoder, which contributes to superior positioning performance.
The fixed-bridge design of the LEGEX series allows independent operation of the X- and Y-axes, effectively eliminating pitch and yaw errors. This design enhances the overall accuracy of the measurements.
The LEGEX CMMs utilize a "center of gravity" drive system, enabling them to achieve high speeds while maintaining ultra-accurate measurements. This drive system ensures optimal performance and efficiency during operation.