Resolution X-Axis:
1.97μin / .05μm
Measuring Method:
Ultra high precision linear encoder
Drive speed (software):
0 - 3.15in/s / 0 - 80mm/s
Drive speed (joystick):
0 - 1.57in/s / 0 - 40mm/s
Measuring Speed:
.00078 - 1.2 in/s / .02 - 30 mm/s
Measuring direction:
Forward/Backward
X-axis inclination angle:
±45°
Z1-axis detector measuring range: 2.4" / 60mm
Z1-axis detector measuring method:
RT detector
Measuring Force:
10, 20, 30, 40, 50mN
One-sided cut Stylus tip (angle °/ radius):
12°/ 1000µin / 12°/ 25µm
Duel-sided cut Stylus tip (angle °/ radius):
30°/ 1000µin / 30°/ 25µm
Column resolution:
39.4μin
Column Resolution:
1μm
Z2-axis Measuring Method:
ABS linear encoder
Column Z2-axis drive speed (Software):
0 - 1.2in/s / 0 - 30mm/s
Z2-axis drive speed (manual joystick):
0 - 1.2in/s / 0 - 30mm/s