Alpha-axis:
Installed
Range X-Axis:
8" / 200mm
Resolution X-Axis:
.2μin / .005μm
Measurement method (X-axis):
Laser Holoscale
X-axis Drive speed (software):
0 - 1.57 in/s / 0 - 40 mm/s
Measuring speed (Surface):
.00078 - .008in/s / .02 - .2mm/s
Measuring speed (Contour):
.0008 - .08in/s / .02 - 2mm/s
Measuring direction (Surface):
Forward/Backward
Alpha-axis resolution:
.000225°
Alpha-axis rotating speed:
1rpm
Column resolution:
1.97μin
Column Resolution:
.05μm
Z2-axis Measuring Method:
RT Linear encoder
Column Z2-axis drive speed (Software):
0 - 7.87in/s / 0 - 200mm/s
Z2-axis drive speed (manual joystick):
0 - 1.97in/s / 0 - 50mm/s
Detector Z-Resolution (Standard Stylus):
.47in / 12mm / .03μin / .008μm
Detector Z-Resolution (Using 2x Stylus):
.94in / 24mm / .06μin / .0016μm
Z1-axis Detecting method:
Laser holoscale
Measuring force (Standard stylus):
4mN
Measuring force (Using 2x stylus):
.75mN
Standard Stylus tip (Diamond, angle °/ tip radius μm):
40/5 (Diamond, angle °/ tip radius μm)
Stylus tip (Sapphire, tip radius mm) (Standard ball-tip):
.25(Sapphire, tip radius mm)(Standard ball-tip)
Stylus tip (Diamond, angle °/ tip radius μm) (Using 2x stylus):
40/5(Diamond, angle °/ tip radius μm)
Stylus tip (Sapphire, tip radius mm) (Using 2x ball-tip stylus):
.25(Sapphire, tip radius mm)(Using 2x ball-tip stylus)
Granite base:
29.5x23.6" / 750x600mm
Main Unit Dimensions:
31.5x24.4x39.4" / 800x620x1000mm
Main Unit Mass:
529lbs / 240kg
Vibration isolation stand method:
Diaphragm air spring
Vibration isolation stand natural frequency:
Vertical: 2.5 to 3.5Hz
Vibration isolation stand damping mechanism:
Orifice
Vibration isolation stand leveling mechanism:
Automatic control with mechanical sensor
Vibration isolation stand air supply pressure:
.4Mpa
Vibration isolation stand loading capacity mass:
771.6lbs / 350kg
Vibration isolation stand dimensions:
42.5x39.2x28.1" / 1080x995x715mm
Vibration isolation stand mass:
694lbs / 315kg