Technical Data
XYZ Travel
Standard
150 x 75 x 125 mm
Optics
Standard
Fixed optical magnification with VIRTUAL ZOOM, S 8.10 standard lens
Optional
S 16.10 Wide Field-of-View / Long Working Distance Replacement Lens
S 4.5 High Magnification Replacement Lens
Illumination
Standard
Substage LED profile, coaxial LED surface, SmartRing LED ring light
Optional
Conical SmartRing (included with S 4.5 lens)
Full Specifications
Standard
Optional
XYZ Travel
150 x 75 x 125 mm
XYZ Scale Resolution
1.0 μm
Drive System
Manual with coarse and fine 3-axis control (X, Y, Z)
Worktable
Anodized with fixture holes and removable stage glass; 7 kg recommended max payload
Optics
Fixed optical magnification with VIRTUAL ZOOM, S 8.10 standard lens
Replacement Lens: S 16.20 Wide Field-of-View/Long Working Distance, S 4.5 High Magnification
Illumination
Substage LED profile, coaxial LED surface, SmartRing™ LED ring light (green)
Conical SmartRing (included with S 4.5 lens)
Metrology Camera
6 megapixel color digital metrology camera
Field of View
7.0 mm x 5.2 mm
S 16.20: 14.0 x 10.4 mm
S 4.5: 3.5 mm x 2.6 mm
Minimum Feature Size
10 µm
S 16.20: 20 µm
S 4.5: 5 µm
Working Distance
62 mm
S 16.20: 110 mm
S 4.5: 31 mm
Software
Measure-X metrology software
Productivity Software: Measure-X Analyze, OGP EVOLVE® Software (Design, Manufacturing, SmartProfile®, SPC)
Offline Software: Measure-X
System Controller
Windows® based with up-to-date processor and onboard networking/communication ports
High-Performance Controller
Controller Options
24” flat panel LCD monitor or dual 24” flat panel LCD monitors, keyboard, 3-button mouse (or user supplied)
Accessories
Footswitch, Digital I/O Automation Interface
Power Requirements
100-120 VAC or 200-240 VAC, 50/60 Hz, 1 phase, 400 W
Safe Operating Environment
15-30 °C, non-condensing
Rated Environment
Temperature 18-22 °C, stable to ± 1 °C, max rate of change 1.0 °C / hour, max vertical gradient of 1 °C / meter; 30-80% humidity; vibration <0.001 g below 15 Hz
XY Area Accuracy
E2 = (4.5 + 8L/1000) μm
Z Linear Accuracy
E1 = (7.0 + 8L/1000) μm
Accuracy is evaluated with an OGP compensation and verification procedure where “L” is measured length in millimeters. Specifications apply within the rated environment. Standard optical specifications apply at the highest magnification of the standard configuration. XY Accuracy applies with an evenly distributed load up to 5 kg in the standard measuring plane. The standard measuring plane is defined as a plane that is within 25 mm of the worktable surface. Depending on load distribution, accuracy at maximum payload may be less than standard.
Lenses can be manually interchanged to change magnification and working distance.
2. Based on width measurement of USAF resolution test chart in best focus at the highest magnification with profile illumination. For reference only.
Last updated: June 2026
