Resolution X-Axis:
1.97μin / .05μm
Measuring Method:
Ultra high precision linear encoder
Drive speed (software):
0 - 3.1in/s / 0 - 80mm/s
Drive speed (joystick):
0 - 1.57in/s / 0 - 40mm/s
Measuring Speed:
.00078 - 1.18 in/s / .02 - 30 mm/s
Measuring direction (Surface):
Backward
Detector Z-Range (Surface):
320, 3200, 32000μin / 8, 80, 800μm
Detector Z-resolution (Surface):
.004, .04, .4μin / .0001, .001, .01μin
Detection Method (Surface):
Differential inductance
Skid Radius of Curvature:
1.57"
Measuring Force (Surface):
0.75mN
Stylus tip (Diamond, angle °/ tip radius) (Surface):
60/2μm
X-axis inclination angle:
±45°
Z1-Axis Detector Measuring Range (Contour):
2.4" / 60mm
Z1-Axis Detector Measuring Method (Contour):
RT detector
Z1-Axis Detector Resolution (Contour):
1.57μin / .04μm
Measuring Direction (Contour):
Forward/Backward
Measuring Force (Contour):
30mN
Stylus tip (Diamond, angle °/ tip radius) (Contour):
12°/ 1000μin / 12°/ 25μm
Column resolution:
39.4μin
Column Resolution:
1μm
Z2-axis Measuring Method:
ABS linear encoder
Column Z2-axis drive speed (Software):
0 - 1.2in/s / 0 - 30mm/s
Z2-axis drive speed (manual joystick):
0 - 1.2in/s / 0 - 30mm/s