Resolution X-Axis:
1.97μin / .05μm
Measurement method (X-axis):
Ultra high precision linear encoder
X-axis Drive speed (software):
0 - 3.15 in/s / 0 - 80 mm/s
Measuring speed (Surface):
.00078 - .08in/s / .02 - .2mm/s
Measuring speed (Contour):
.02 - 30in/s / .00078 - 1.2mm/s
Measuring direction (Surface):
Forward/Backward
Alpha-axis inclination angle:
±45°
Column resolution:
39.4μin
Column Resolution:
1μm
Z2-axis Measuring Method:
ABS linear encoder
Column Z2-axis drive speed (Software):
0 - 1.2in/s / 0 - 30mm/s
Z2-axis drive speed (manual joystick):
0 - 1.56in/s / 0 - 40mm/s
Detector Z-Range:
.2" / 5mm
Detector Z-Resolution:
.0315/.0019, .315/.019, 3.15/0.19μin/in / .0008/.05, .008/.5, .08/5μm/mm
Z1-axis Detecting method:
Differential inductance
Measuring Force:
.75mN
Stylus tip (Diamond, angle °/ tip radius) (Surface):
60/78.7μin / 60/2μm
Stylus tip (Sapphire, angle °/ tip radius) (Contour):
30/984.3μin / 30/2μm
Vibration isolation stand method:
Diaphragm air spring
Vibration isolation stand natural frequency:
Vertical: 2.5 to 3.5Hz
Vibration isolation stand damping mechanism:
Orifice
Vibration isolation stand leveling mechanism:
Automatic control with mechanical sensor
Vibration isolation stand air supply pressure:
.4 to .7Mpa